Michael Fury - If it's a relatively thick copper oxide layer, just counting...

If it's a relatively thick copper oxide layer, just counting on a pre-deposition sputter clean to get rid of it isn't reliable enough. So you really want to bring it back to the bare metal with the wet process, and then, if any native oxide forms, at least it's more predictable and thinner than it might otherwise be.

Michael Fury

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Michael Fury Quotes

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If it's a relatively thick copper oxide layer, just counting on a pre-deposition sputter clean to get rid of it isn't reliable enough. So you really want to bring it back to the bare metal with the wet process, and then, if any native oxide forms, at least it's more predictable and thinner than it might otherwise be. Michael Fury

They Said So®

Keywords

thick copper oxide layer counting pre-deposition sputter clean rid reliable bring back bare metal wet process native forms predictable thinner

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